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Proven Plasma Power for next generations of PV Cells | 用于下一代光伏电池的成熟等离子电源

Michael Ehinger photo
16 Dec 2021
16:30 – 16:45

Proven Plasma Power for next generations of PV Cells | 用于下一代光伏电池的成熟等离子电源

TRUMPF Huettinger is serving PV-Cell tool makers with DC, MF and DC plasma power supplies for depositing best in class a-Si / AlOx / SiN / TCO layers. Plasma Power Supplies are one of the most critical components having an influence on the future cost reduction for PV Cells.

PERC technology:

PECVD Bipolar Generators are widely used in any PERC fab on global base and TRUMPF Huettinger holding more than 80% market share due to perfect product and layer quality. In this section we will introduce next generation of multi output products granting future success.

TOPCon:

A TOPCon production line can be upgraded from the current PERC line using TRUMPF Huettinger PECVD Bipolar power. Unique features and easy integration are tailor made for the upgrade needs.

HTJ:

„Heterojunction technology“ is demanding different Plasma Power Frequencies: DC, RF and VHF technology. During this chapter TRUMPF Huettinger will present the latest product innovations to improve process results and reduce LOCE.

Plasma Power Services:

IoT – “Internet of Things” revolutionize the Industry and will be the base for next level service excellence. Additionally, service packages as “Warranty Extension” and “Power Upgrade” will be introduced.