Ultimate Cost down for Emitter- and Passivated Contact Applications. Boosting Output of Low Pressure Diffusion- and LPCVD Equipment
In his talk, Raymond will provide a heads up on the latest developments ofhigh throughput horizontal tube furnaces.Since Semco first introduced herLYDOP reduced pressure furnaces to the PV Industry 15 years ago, LP systems became a commodity.Nowadays manufacturing of advanced cell technologiescontinues to require higher equipment output capacity.Semco’s latest HORTUS equipment platform is exactly matching this purpose.It isusing a novel horizontal wafer processing method. Over 8000 (!) wafers can be processed per cycle. The HORTUS is also eliminating the current industry challenges with atmospheric boron diffusion. Uniquely it is compliant with high volume LPCVD back to back processing, enabling high volume passivated contact manufacturing. Substantial lower manufacturingcosts are realized without sacrificing process yield control.